Title :
Love waves in a quartz-based phononic structure
Author :
Tsung-Tsong Wu ; Ting-Wei Liu ; Yu-Ching Lin ; Yao-Chuan Tsai ; Ono, Takahito ; Tanaka, Shoji
Author_Institution :
Inst. of Appl. Mech., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
This paper presents result of Love wave propagation in a quartz substrate coated with a phononic thin film. In such a phononic structure, large acoustic band gaps with strong reflection for the Love waves are existed. The frequency range and Love wave attenuation in the band gap were predicted by the acoustic band structure utilizing the complex wavenumbers. MEMS experiments were conducted to verify the band gap in the GHz range and the results are in good accordance with the numerical predictions.
Keywords :
Love waves; phononic crystals; quartz; MEMS; SiO2; acoustic band gaps; love waves; phononic thin film; quartz-based phononic structure; Crystals; Photonic band gap; Silicon compounds; Substrates; Surface acoustic waves;
Conference_Titel :
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location :
Taipei
DOI :
10.1109/FCS.2014.6859979