DocumentCode
186014
Title
Love waves in a quartz-based phononic structure
Author
Tsung-Tsong Wu ; Ting-Wei Liu ; Yu-Ching Lin ; Yao-Chuan Tsai ; Ono, Takahito ; Tanaka, Shoji
Author_Institution
Inst. of Appl. Mech., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2014
fDate
19-22 May 2014
Firstpage
1
Lastpage
3
Abstract
This paper presents result of Love wave propagation in a quartz substrate coated with a phononic thin film. In such a phononic structure, large acoustic band gaps with strong reflection for the Love waves are existed. The frequency range and Love wave attenuation in the band gap were predicted by the acoustic band structure utilizing the complex wavenumbers. MEMS experiments were conducted to verify the band gap in the GHz range and the results are in good accordance with the numerical predictions.
Keywords
Love waves; phononic crystals; quartz; MEMS; SiO2; acoustic band gaps; love waves; phononic thin film; quartz-based phononic structure; Crystals; Photonic band gap; Silicon compounds; Substrates; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
Frequency Control Symposium (FCS), 2014 IEEE International
Conference_Location
Taipei
Type
conf
DOI
10.1109/FCS.2014.6859979
Filename
6859979
Link To Document