Title :
Nanostructural characterization of carbon nanofibers for on-chip interconnect applications with scanning transmission electron microscopy
Author :
Ominami, Y. ; Ngo, Q. ; Austin, A.J. ; Cassell, A.M. ; Cruden, B.A. ; Li, J. ; Meyyappan, M. ; Yang, C.Y.
Author_Institution :
Center for Nanostructures, Santa Clara Univ., CA, USA
Abstract :
Recent studies in the nanostructural characterization for on-chip interconnect using carbon nanofibers (CNFs) is presented. In this paper, we compare the resistance and structure between Ni and Pd-catalyzed CNFs, which show differing electrical properties. These samples are characterized with scanning transmission electron microscopy (STEM). Our analysis reveals the nanostructure of CNFs in detail. We also discuss the growth mechanisms of CNFs and the choice of catalyst materials used for interconnects development.
Keywords :
carbon fibres; catalysis; nanostructured materials; nanotechnology; nickel; palladium; scanning electron microscopy; transmission electron microscopy; C; Ni; Pd; carbon nanofibers; catalyst materials; electrical resistance; on-chip interconnect; scanning transmission electron microscopy; Chemical vapor deposition; Contact resistance; Electric resistance; Electric variables measurement; Electrical resistance measurement; Nanostructures; Nanotechnology; Plasma measurements; Scanning electron microscopy; Transmission electron microscopy;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500857
