Title :
Novel 2D ordered arrays of nanostructures fabricated through silica masks formed by bilayer colloidal crystals as templates
Author :
Wang, Benzhong ; Chua, Soo-jin ; Teng, Jinghua
Author_Institution :
Inst. of Mater. Res. & Eng., Singapore, Singapore
Abstract :
Here, we present a facile approach to fabricate two-dimensional ordered arrays of nanostructures through three-dimensional silica networks, which are formed by using bilayer colloidal crystals as templates. Experimental results shown the three-dimensional silica nanostructures severed a good mask to create two-dimensional ordered arrays of nanostructures.
Keywords :
masks; nanostructured materials; nanotechnology; 2D ordered arrays; SiO2; bilayer colloidal crystals; nanostructures; silica masks; three-dimensional silica networks; Colloidal crystals; Crystalline materials; Dry etching; Lithography; Nanostructured materials; Nanotechnology; Semiconductor materials; Semiconductor nanostructures; Silicon compounds; Substrates;
Conference_Titel :
Nanotechnology, 2005. 5th IEEE Conference on
Print_ISBN :
0-7803-9199-3
DOI :
10.1109/NANO.2005.1500866
