Toward Fully Integrated CMOS Based Capacitive Sensor for Lab-on-Chip Applications

Author

Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad

Author_Institution

Polystim Neurotechnologies Lab., Dept. of Electr. Eng., Polytech. de Montreal, Montreal, QC

fYear

2008

fDate

9-10 May 2008

Firstpage

77

Lastpage

80

Abstract

In this paper, we present a hybrid capacitive sensor featuring a 0.18mum CMOS integrated circuit incorporated with a microfluidic channel and a polyelectrolyte sensing layer (PSL). We describe the formation of ultrathin PSL atop a microfabricated gold electrode (MGE) and CMOS sensor, and thereafter demonstrate the viability of this new approach for Lab- on-Chip (LoC) applications. A direct-write fabrication process (DWFP) is also employed to create microchannel above CMOS chip in order to direct chitosan and alginate solutions toward the electrodes and form an on- chip PSL for detection purposes.

Keywords

CMOS integrated circuits; biological techniques; gold; lab-on-a-chip; microfluidics; microsensors; polymer electrolytes; CMOS integrated circuit; alginate solutions; chitosan; direct-write fabrication process; fully integrated CMOS based capacitive sensor; lab-on-chip applications; microfabricated gold electrode; microfluidic channel; ultrathin polyelectrolyte sensing layer; CMOS integrated circuits; CMOS process; Capacitive sensors; Electrodes; Fabrication; Gold; Lab-on-a-chip; Microchannel; Microfluidics; Sensor phenomena and characterization;

fLanguage

English

Publisher

ieee

Conference_Titel

Medical Measurements and Applications, 2008. MeMeA 2008. IEEE International Workshop on

Conference_Location

Ottawa, ON

Print_ISBN

978-1-4244-1937-1

Electronic_ISBN

978-1-4244-1938-8

Type

conf

DOI

10.1109/MEMEA.2008.4543002

Filename

4543002