Title :
Programmable batch assembly of microparts with 100% yield
Author :
Hoo, J. ; Baskaran, R. ; Bohringer, K.F.
Author_Institution :
Univ. of Washington, Seattle, WA, USA
Abstract :
This paper demonstrates a novel method to perform micropart (370 times 370 times 150 mum3) delivery to receptor sites (20 times 10 array) with a batch assembly process that leads to 100% yield within tens of seconds. The delivery mechanism is statistically characterized and a chemical kinetics inspired model previously proposed is extended. Based on this understanding, repeatable and programmable 100% yield assembly is achieved in open loop and feedback configurations.
Keywords :
batch production systems; microassembling; packaging; reaction kinetics; chemical kinetics inspired model; feedback configuration; micropart delivery; microparts assembly; open loop configuration; packaging; programmable batch assembly; receptor sites; size 150 mum; size 370 mum; yield assembly; Assembly systems; Chemicals; Feedback loop; Kinetic theory; Lead; Liquids; Packaging; Robotic assembly; Self-assembly; Surface tension; Self-assembly; heterogeneous integration; packaging;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285762
