Room-temperature wafer-level hermetic sealing for liquid reservoirs by gold ring embossing

In this paper, we present a novel room temperature wafer-level sealing process for hermetic sealing of reservoirs filled with liquids. This technique can be used for e.g. drug delivery devices or thermo pneumatic devices. The sealing mechanism is based on plastic deformation of metal squeeze rings and embossing of target structures. Epoxy based underfill is used for mechanical stabilization of the wafer bond. We present experimental results from room-temperature bonding of glass wafers to silicon wafers with encapsulation of liquids in reservoirs.