Zernike mode generation and dynamic focusing using a micromachined membrane deformable mirror

Author

Lijun Zhu ; Pang-Chen Sun

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., San Diego, La Jolla, CA, USA

fYear

1999

fDate

28-28 May 1999

Firstpage

21

Lastpage

22

Abstract

Summary form only given. Multi-channel micromachined membrane deformable mirrors (MMDM) are recently developed devices with advantages of low-cost, compactness and up to a few hundred hertz bandwidth. We characterize the MMDM device to study its capability for correcting high order aberrations by producing individual Zernike wave-front modes using our control algorithm. We also demonstrate the use of MMDM for low aberration dynamic focusing.

Keywords

aberrations; adaptive optics; micro-optics; micromachining; mirrors; optical focusing; Zernike mode generation; adaptive optics; compactness; control algorithm; dynamic focusing; high order aberrations; individual Zernike wave-front modes; low aberration dynamic focusing; low-cost; micromachined membrane deformable mirror; multi-channel micromachined membrane deformable mirrors; Actuators; Biomembranes; Control systems; Genetic algorithms; Mirrors; Nonlinear control systems; Optical control; Optimized production technology; Shape; Voltage control;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on

Conference_Location

Baltimore, MD, USA

Print_ISBN

1-55752-595-1

Type

conf

DOI

10.1109/CLEO.1999.833822

Filename

833822