Title :
Cantilever sensors equipped with nano sensing effects for ultra-sensitive detection of bio/chemical molecules
Author_Institution :
State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China
Abstract :
The paper presents micromechanical cantilever sensors with self-sensing element integrated for trace-level bio/medical detection. To significantly improve sensing performance, nano-size related effects are found and utilized that mainly come from surfaces/interfaces. Such effects can be categorized into three kinds, which sequentially are the surface effects due to the cantilever dimension shrunk into nano-scale, the effects at the interface between the solid surface of the cantilever (or its modified surface) and the self-assembled sensing molecule-layer, as well as, the size effects from the nano-metric signal self-sensing elements integrated in the cantilevers. With the nano-effects equipped, trace-level bio/chemical detecting experiments of the cantilever sensors and their promising applications are also related.
Keywords :
biosensors; cantilevers; chemical sensors; microsensors; nanosensors; self-assembly; biomolecules; chemical molecule detection; microelectromechanical system; micromechanical cantilever sensor; nano sensing effects; self-assembled sensing; self-sensing elements; surface effects; ultra-sensitive detection; Accelerometers; Biosensors; Chemical and biological sensors; Chemical elements; Chemical sensors; Chemical technology; Frequency; Micromechanical devices; Resonance; Springs; Microelectromechanical systems; integrated micro-cantilever sensors; nano effects; trace bio/chemical detection; ultra sensitivity;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285770
