DocumentCode
1860785
Title
High Q factor plate resonators for ultrasensitive mass sensing applications
Author
Agache, V. ; Cochet, M. ; Blanc, R. ; Baleras, F. ; Caillat, P.
Author_Institution
DTBS, CEA, Grenoble, France
fYear
2009
fDate
21-25 June 2009
Firstpage
1630
Lastpage
1633
Abstract
This paper focuses on the application of a single-crystal silicon (SCS) bulk mode resonators for ultrasensitive mass detection. The mass sensing element is either a square or a disk plate fabricated in SCS, which is driven in the wine glass (WG) mode thanks to an electrostatic coupling. Indeed, compared to flexural beams counterparts, it has higher quality factors, which is desirable for improved mass resolution.
Keywords
Q-factor; crystal resonators; disk plate; electrostatic coupling; flexural beams; high Q factor plate resonators; single-crystal silicon bulk mode resonators; ultrasensitive mass sensing; wine glass mode; Electrodes; Electrostatics; Glass; Micromechanical devices; Optical resonators; Q factor; Resonance; Resonant frequency; Shape; Thermoelasticity; Mass sensor; Wine glass mode; square & disk plate resonator;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285772
Filename
5285772
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