Tip-matter interaction measurements using mems ring resonators

We have previously reported on a new concept of atomic force microscope (AFM) probes using bulk-mode silicon resonators. We report here measurements of interaction between a surface and the vibrating tip of the resonator. In particular, the tip oscillation amplitude versus the probe-sample distance has been acquired for various surface materials. These experiments give access to the electrical response of the resonator regarding the tip-surface interaction and represent a first step towards force spectroscopy using MEMS resonators based probes. This work paves the way to the integration of such probes in an AFM set-up using the resonator output signal as the AFM feedback control signal.