Sensitivity enhancement by micro Helmholtz resonator for ultrasonic distance sensor

Author

Suzuki, A. ; Takahashi, H. ; Iwase, E. ; Matsumoto, K. ; Shimoyama, I.

Author_Institution

Grad. Sch. of Inf. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan

fYear

2009

fDate

21-25 June 2009

Firstpage

1557

Lastpage

1560

Abstract

This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 mum height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.

Keywords

acoustic intensity; distance measurement; microphones; microsensors; piezoresistive devices; ultrasonic transducers; acoustic pressure; cantilever vibration; micro-Helmholtz resonator; piezoresistive cantilever microphone; sensitivity enhancement; ultrasonic distance sensor; ultrasonic waves; Acoustic noise; Acoustic sensors; Acoustic signal detection; Acoustic waves; Microphones; Neck; Noise robustness; Piezoresistance; Resonance; Resonant frequency; Distance sensor; Helmholtz resonator; Piezoresistive cantilever;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285784

Filename

5285784