Title :
Sensitivity enhancement by micro Helmholtz resonator for ultrasonic distance sensor
Author :
Suzuki, A. ; Takahashi, H. ; Iwase, E. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution :
Grad. Sch. of Inf. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper reports on a micro Helmholtz resonator (HR) enhancing the sensitivity of an ultrasonic distance sensor. Attaching an HR to the sensor that consists of a piezoresistive cantilever microphone makes its sensitivity against ultrasonic wave higher. A HR of 600 mum height demonstrated a 17.5 times larger maximum amplitude of the cantilever vibration against single frequency wave. We also evaluated the dependence of the sensitivity on frequency and acoustic pressure. Our sensor was able to detect the distance of 0.5-6.0 m with the maximum error of 2.0%.
Keywords :
acoustic intensity; distance measurement; microphones; microsensors; piezoresistive devices; ultrasonic transducers; acoustic pressure; cantilever vibration; micro-Helmholtz resonator; piezoresistive cantilever microphone; sensitivity enhancement; ultrasonic distance sensor; ultrasonic waves; Acoustic noise; Acoustic sensors; Acoustic signal detection; Acoustic waves; Microphones; Neck; Noise robustness; Piezoresistance; Resonance; Resonant frequency; Distance sensor; Helmholtz resonator; Piezoresistive cantilever;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285784
