A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighing

Author

Yang, X. ; Zhou, Z.Y. ; Zheng, F.Z. ; Zhang, M. ; Zhang, J. ; Yao, Y.G.

Author_Institution

Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China

fYear

2009

fDate

21-25 June 2009

Firstpage

1493

Lastpage

1496

Abstract

A single-walled carbon-nanotube-array-based (SWCNT) strain sensor was proposed and its fabrication technique was presented, which afforded more simple process than individual SWCNT-based sensor. A novel selective treatment of strain-based electrical breakdown was utilized to leave the SGS-SWCNTs with high gauge factor in the array. The SWCNT-array strain sensor were used for weighing experiment and the results showed that the sensor´s output was basically linear. It also showed that the sensor had relatively higher sensitivity (GF ap 20) and lower power consumption (tens of nanoWatts) than metal strain-gauge, which had potential applications in high sensitivity strain, weighing or pressure sensors.

Keywords

carbon nanotubes; electric breakdown; gauges; pressure measurement; pressure sensors; strain measurement; strain sensors; C; electrical breakdown; gauge factor; lower power consumption; pressure sensors; single walled carbon nanotube array; strain sensor; weighing experiment; Capacitive sensors; Carbon nanotubes; Chemical sensors; Conductive adhesives; Electrodes; Fabrication; Instruments; Polymer films; Sensor arrays; Silicon; CARBON NANOTUBE ARRAY; PIEZORESISTANCE; WEIGHING SENSOR;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285798

Filename

5285798