Title :
A CMOS-MEMS rotary microactuator suitable for hard disk drive applications
Author :
Messner, W.C. ; Bain, J.A. ; Koenders, M. ; Groenesteijn, J. ; Marsman, G.H. ; Gilgunn, P.J. ; Fedder, G.K.
Author_Institution :
Mech. Eng. Dept., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This work presents an electrothermal rotary actuator fabricated using CMOS-MEMS technology. The device discussed herein shows a rotational stroke of more than 10deg and an electrothermal actuation cut-off frequency of 300 Hz. The device footprint is less than 1 mm times 1 mm and power consumption is less than 10 mW. The above performance and the device topology make it attractive for application in hard disk drive (HDD) head actuation applications. This paper details fabrication and characterization of this device and methods for extending its performance to levels needed for HDD applications.
Keywords :
CMOS integrated circuits; disc drives; hard discs; microactuators; network topology; CMOS-MEMS technology; device topology; electrothermal rotary actuator; frequency 300 Hz; hard disk drive; head actuation application; power consumption; rotary microactuator; CMOS technology; Disk drives; Electrothermal effects; Foundries; Hard disks; Microactuators; Pneumatic actuators; Stators; Topology; Transducers; CMOS MEMS; Electrothermal Actuation; Hard Disk Drive; Rotary Actuator; Second Stage Actuator;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285802
