Title :
2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studies
Author :
Liu, F. ; Laboriante, I. ; Bush, B. ; Roper, C.S. ; Carraro, C. ; Maboudian, R.
Author_Institution :
Dept. of Chem. Eng., Univ. of California, Berkeley, CA, USA
Abstract :
Growing interest in assessing the reliability of microelectromechanical systems has created a need for the development of microinstruments to interrogate MEMS behavior under diverse conditions. This paper describes the design and testing of a microinstrument for in-situ reliability studies of contacting surfaces in MEMS. Time-dependent changes in the structure, chemistry and electrical properties of polycrystalline silicon (poly-silicon) impacting surfaces are observed, and possible wear mechanisms are proposed.
Keywords :
mechanical contact; micromechanical devices; reliability; stiction; wear; 2-axis MEMS deflecting cantilever microinstrument; crystalline silicon electrical properties; impacting surfaces; microelectromechanical systems reliability; microinstrument design; microinstrument testing; Atomic force microscopy; Atomic measurements; Chemistry; Contacts; Force measurement; Instruments; Micromechanical devices; Scanning electron microscopy; Silicon; Surface resistance; MEMS reliability; adhesive wear; atomic force microscopy; nanotribology; stiction;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285804
