Title :
Micromechanics via synchrotron radiation
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
A significant portion of micromechanics deals with actuators: devices which modify their environment. Manufacturing techniques for this class of devices involve 3-dimensionality, tolerances, IC-compatibility, a broad material base and cost effectiveness. Photoresist based processing with X-ray exposures via synchrotron radiation has many of the required attributes for actuator manufacturing. This is particularly true for exposures with 20 keV X-rays where structural heights to 10 cm have been obtained and where X-ray mask issues simplify. Tests with this type of tool have brought significant advances in linear actuators and have been used to fabricate a micro electro mechanical system, a dynamometer on a chip, for magnetic micromotor testing
Keywords :
X-ray masks; dynamometers; integrated circuit technology; machine testing; microactuators; micromotors; synchrotron radiation; 10 cm; 20 keV; LIGA; X-ray exposures; X-ray mask; actuator manufacturing; dynamometer; linear actuators; magnetic micromotor testing; micro electro mechanical system; micromechanics; photoresist based processing; synchrotron radiation; Actuators; Costs; Electrostatics; Microactuators; Microelectronics; Micromechanical devices; Resists; Sensor phenomena and characterization; Synchrotron radiation; System testing;
Conference_Titel :
Particle Accelerator Conference, 1995., Proceedings of the 1995
Conference_Location :
Dallas, TX
Print_ISBN :
0-7803-2934-1
DOI :
10.1109/PAC.1995.504567
