Title :
A new magnetically actuated switch for precise position detection
Author :
Coutier, C. ; Chiesi, L. ; Garnier, A. ; Fourrier, J.C. ; Lapiere, C. ; Trouillon, M. ; Grappe, B. ; Vincent, M. ; Samperio, A. ; Borel, S. ; Dieppedale, C. ; Lorent, E. ; Sibuet, H.
Author_Institution :
Schneider Electr. Ind., Grenoble, France
Abstract :
This paper reports on a new component which allows a mechanical position to be accurately detected. This component is a magnetically actuated microswitch fabricated in MEMS technology. Unlike the well-known Reed or Hall switches components this magnetic microswitch offers all of the following advantages: (1) a powerless sensor, (2) a highly integrated sensor (less than 3 mm3), (3) an electrical isolation (dry contact) (4) a high position accuracy (no component dispersion), (5) an easy implementation in real applications, thanks to a well verified analytical model. Position detection accuracy of the sensor as well as electrical and reliability tests results are reported.
Keywords :
electromagnetic actuators; microfabrication; microswitches; position measurement; MEMS technology; electrical isolation; integrated sensor; magnetic microswitch; magnetic position sensors; magnetically actuated switch; microfabrication; powerless sensor; precise position detection; Analytical models; Contacts; Isolation technology; Magnetic sensors; Magnetic switching; Mechanical sensors; Micromagnetics; Micromechanical devices; Microswitches; Switches; MEMS microswitch; magnetic position sensor; reliability;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285825
