Laser-printed magnetic-polymer microstructures

We developed a new process for laser-printing a thin-film magnetic-polymer composite microstructural material directly onto planar silicon substrates and characterized its magnetic and mechanical properties. Using this technique we fabricated cantilever beams 100-2000 mum long, 100-500 mum wide, and 6-8 mum thick. An external magnet was used to demonstrate actuation via magnetic field gradient forces, and a scanner was constructed able to deflect a laser beam 3deg. This technique takes advantage of advances in commercial laser printing technology and is suitable for low-cost, low-temperature, large-area MEMS devices and rapid MEMS fabrication on a variety of substrates.