Title :
Hyperspectral imaging using a micromachined in-plane vibratory grating scanner
Author :
Zhou, Guangya ; Cheo, Kelvin K L ; Du, Yu ; Chau, Fook Siong
Author_Institution :
Dept. of Mech. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A novel hyperspectral imaging application of the MEMS grating scanner is proposed in this paper. By utilizing the high-speed and optically dispersive characteristic of the grating scanner, a potentially low-cost, small footprint configuration is demonstrated. High-speed scanning without significant optical degradation due to dynamic deformation of the platform is possible using grating scanner. The single photodetector system relies on the grating scanner to perform spatial scanning and two slower galvano-mirror scanners to perform spectral scanning. A system proof-of-concept was successfully demonstrated in acquiring the spectral image and spatial dimensions of two reference laser diodes.
Keywords :
mirrors; optical images; optical scanners; photodetectors; MEMS grating scanner; galvano-mirror scanners; hyperspectral imaging; micromachined in-plane vibratory grating scanner; reference laser diodes; single photodetector system; spatial scanning; spectral scanning; Biomedical optical imaging; Degradation; Gratings; High speed optical techniques; Hyperspectral imaging; Micromechanical devices; Mirrors; Optical filters; Optical sensors; Photodetectors; Hyperspectral imaging; MEMS; grating scanner;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285828
