Title :
An electrostatic energy harvester with electret bias
Author :
Halvorsen, E. ; Westby, E.R. ; Husa, S. ; Vogl, A. ; Østbø, N.P. ; Leonov, V. ; Sterken, T. ; Kvisterøy, T.
Author_Institution :
Vestfold Univ. Coll., Horten, Norway
Abstract :
We have designed, fabricated and characterized a MEMS electrostatic energy harvester using an electret as internal bias. The device operates in continuous mode and features a high voltage output, a large travelling distance of a big mass within a compact design using full bulk silicon thickness. The output power is about 1 muW at an acceleration power spectral density of 0.03g2/Hz.
Keywords :
electrostatic devices; energy harvesting; micromechanical devices; vibrations; MEMS electrostatic energy harvester; electret bias; full bulk silicon thickness; vibration energy harvester; Acceleration; Capacitance; Circuits; Electrets; Electrostatics; Silicon; Springs; Strips; Transducers; Voltage; Electret; Electrostatic Transducer; Energy harvester; Vibration;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285829
