Title :
A series of ion accelerators for industry
Author :
Sukhina, B.N. ; Alinovsky, N.I. ; Chertok, I.L. ; Chumakov, S.N. ; Dikansky, N.S. ; Goncharov, A.D.
Author_Institution :
Budker Inst. of Nucl. Phys., Novosibirsk, Russia
Abstract :
Ion accelerators intended for application to electronics industry, surface modification and other technologies are described. A series of the accelerators are characterized by horizontal ion beam position. The energy ranges from 20 keV to 1.5 MeV. In the frame of this project, the ION-300, ION-1500 installations were designed, built and successfully tested. The main rectifier and high voltage terminals of the accelerators have a power supply of the increased frequency. The high voltage terminals are supplied with a power up to 2.2 kW using special small-size resonant transformers. The accelerators are provided with ion beam separation on full energy, oil-free vacuum, high voltage isolation (SF6), and an intelligent automatic control system with an IBM PC host computer. A special set of technical, hardware and software decisions allows us to meet the reliability requirements
Keywords :
ion accelerators; rectifiers; semiconductor technology; 2.2 kW; 20 keV to 1.5 MeV; ION-1500; ION-300; SF6; electronics industry; high voltage isolation; high voltage terminals; intelligent automatic control system; ion accelerators; power supply; rectifier; resonant transformers; surface modification; Electronics industry; Elementary particle vacuum; Frequency; Ion accelerators; Ion beams; Power supplies; Rectifiers; Resonance; Testing; Transformers;
Conference_Titel :
Particle Accelerator Conference, 1995., Proceedings of the 1995
Conference_Location :
Dallas, TX
Print_ISBN :
0-7803-2934-1
DOI :
10.1109/PAC.1995.504592
