Title :
UV-LIGA microfabrication for high frequency structures of a Y-band TWT 2nd harmonic amplifier
Author :
Hanyan Li ; Jun Cai ; Yinghua Du ; Xinghui Li ; Jinjun Feng
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Vacuum Electron., Beijing Vacuum Electron. Res. Inst., Beijing, China
Abstract :
In this paper, we fabricate copper high frequency structures for a Y-band(170-220GHz) TWT 2nd harmonic amplifier using UV LIGA technology. The two halves have been bonded and assembled in the amplifier. The measurement results of the amplifier show that over 100mW harmonic output power with most of the 11.4GHz of bandwidth at 1% duty cycle have been achieved, and the maximum harmonic output power reaches 500mW.
Keywords :
LIGA; microfabrication; travelling wave tubes; UV LIGA technology; UV-LIGA microfabrication; Y-band TWT 2nd harmonic amplifier; bandwidth 11.4 GHz; frequency 170 GHz to 220 GHz; high frequency structures; power 100 mW; power 500 mW; Frequency conversion; Image resolution; Rough surfaces; Surface roughness; TWT 2nd harmonic amplifier; UV-LIGA; high frequency structure;
Conference_Titel :
Vacuum Electronics Conference (IVEC), 2015 IEEE International
Conference_Location :
Beijing
Print_ISBN :
978-1-4799-7109-1
DOI :
10.1109/IVEC.2015.7223881
