Design, Fabrication and Control of a Micro X-Y Stage with Large Ultra-Thin Film Recoding Media Platform

Author

Lu, Yang ; Pang, Chee Khiang ; Chen, Jiann-Jong ; Zhu, Hengliang ; Yang, J.P. ; Mou, J.Q. ; Guo, G.X. ; Chen, Ben M. ; Lee, Tong H.

fYear

2005

fDate

2005

Firstpage

Lastpage

Keywords

Actuators; Fabrication; Finite element methods; Memory; Micromachining; Micromechanical devices; Probes; Prototypes; Silicon; Suspensions;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on

Print_ISBN

0-7803-9047-4

Type

DOI

10.1109/AIM.2005.1500959

Filename

1500959

Link To Document