DocumentCode :
1862573
Title :
Design, Fabrication and Control of a Micro X-Y Stage with Large Ultra-Thin Film Recoding Media Platform
Author :
Lu, Yang ; Pang, Chee Khiang ; Chen, Jiann-Jong ; Zhu, Hengliang ; Yang, J.P. ; Mou, J.Q. ; Guo, G.X. ; Chen, Ben M. ; Lee, Tong H.
fYear :
2005
fDate :
2005
Firstpage :
19
Lastpage :
24
Keywords :
Actuators; Fabrication; Finite element methods; Memory; Micromachining; Micromechanical devices; Probes; Prototypes; Silicon; Suspensions;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
Type :
conf
DOI :
10.1109/AIM.2005.1500959
Filename :
1500959
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1862573
