A prototype of MEMS gyroscope based on digital control

In order to improve the performance of the Micro Electronic Mechanical System (MEMS) gyroscope, a digital control scheme based on Field Programmable Gate Array (FPGA) is proposed. The phase locked loop (PLL) in phase tracking, the automatic gain control (AGC) in amplitude control and the quadrature demodulation in the sense output are analyzed respectively. Some important experiments are done and the results adequately show that the scheme is feasible and reliable. The scale factor of the gyroscope is −1.6mV/°/s in the measurement range of ±300°/s, and the zero bias stability attains 22.44°/h.