Title :
Superparamagnetic photosensitive polymer nanocomposite for microactuators
Author :
Suter, M. ; Graf, S. ; Ergeneman, O. ; Schmid, S. ; Camenzind, A. ; Nelson, B.J. ; Hierold, C.
Author_Institution :
Dept. of Mech. & Process Eng., ETH Zurich, Zurich, Switzerland
Abstract :
We present a photosensitive polymer composite with superparamagnetic characteristics for the fabrication of microactuators. A uniform distribution of particles in the photosensitive polymer matrix SU-8 is achieved by applying superparamagnetic nanoparticles with the aid of a surfactant. The composite contains Fe3O4 nanoparticles up to 3 vol.% (12 wt.%) with diameters of around 13 nm. Superparamagnetic composite microcantilevers are successfully fabricated and actuated in resonance by the magnetic field of an external coil.
Keywords :
cantilevers; iron compounds; microactuators; microfabrication; nanocomposites; superparamagnetism; Fe3O4; Superparamagnetic composite microcantilevers; external coil; magnetic field; microactuators; photosensitive polymer matrix; superparamagnetic nanoparticles; superparamagnetic photosensitive nanocomposite; superparamagnetic polymer nanocomposite; Actuators; Fabrication; Magnetic anisotropy; Magnetic materials; Magnetic resonance; Microactuators; Nanoparticles; Perpendicular magnetic anisotropy; Polymers; Saturation magnetization; Superparamagnetic composite; magnetic SU-8; magnetic cantilever; magnetic microactuator; magnetic polymer; magnetic resonant structure; photosensitive composite;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285841
