• DocumentCode
    1862746
  • Title

    Current conduction mechanisms of heteroepitaxial and homoepitaxial GaN films grown by MBE

  • Author

    Dogan, S. ; Spradlin, J. ; Molnar, R. ; Baski, A.A. ; Morkoc, H.

  • Author_Institution
    Dept. of Electr. Eng., Virginia Commonwealth Univ., Richmond, VA, USA
  • fYear
    2003
  • fDate
    25-27 Aug. 2003
  • Firstpage
    8
  • Lastpage
    14
  • Abstract
    We have investigated the current conduction of homo- and heteroepitaxial GaN-based films using conductive atomic force microscopy (C-AFM) and temperature dependent current-voltage (I-V-T) measurements. For homoepitaxial film grown on an HVPE template, C-AFM shows enhanced current conduction at hillocks that are associated with screw dislocations. Local current voltage measurements indicate two different forward-bias conduction mechanisms on and off such hillocks: Poole-Frenkel and field emission, respectively. In the case of heteroepitaxial film growth on sapphire, C-AFM data do not indicate a strong correlation between topography and current conduction. I-V-T measurements of Schottky diodes show thermionic field emission at high forward bias and hopping conduction at reverse bias. KOH etching of the film improves its thermionic emission properties.
  • Keywords
    III-V semiconductors; Poole-Frenkel effect; Schottky diodes; atomic force microscopy; etching; gallium compounds; hopping conduction; molecular beam epitaxial growth; screw dislocations; semiconductor epitaxial layers; thermionic electron emission; C-AFM; GaN; KOH etching; MBE; Poole-Frenkel mechanism; Schottky diodes; conductive atomic force microscopy; current conduction; forward-bias conduction mechanisms; heteroepitaxial GaN films; hillocks; homoepitaxial GaN films; hopping conduction; reverse bias conduction; sapphire; screw dislocations; temperature dependent current-voltage measurements; thermionic field emission; topography; Atomic force microscopy; Atomic measurements; Conductive films; Conductivity measurement; Current measurement; Force measurement; Gallium nitride; Molecular beam epitaxial growth; Temperature dependence; Thermionic emission;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Compound Semiconductors: Post-Conference Proceedings, 2003 International Symposium on
  • Print_ISBN
    0-7803-8614-0
  • Type

    conf

  • DOI
    10.1109/ISCSPC.2003.1354424
  • Filename
    1354424