Title :
Current conduction mechanisms of heteroepitaxial and homoepitaxial GaN films grown by MBE
Author :
Dogan, S. ; Spradlin, J. ; Molnar, R. ; Baski, A.A. ; Morkoc, H.
Author_Institution :
Dept. of Electr. Eng., Virginia Commonwealth Univ., Richmond, VA, USA
Abstract :
We have investigated the current conduction of homo- and heteroepitaxial GaN-based films using conductive atomic force microscopy (C-AFM) and temperature dependent current-voltage (I-V-T) measurements. For homoepitaxial film grown on an HVPE template, C-AFM shows enhanced current conduction at hillocks that are associated with screw dislocations. Local current voltage measurements indicate two different forward-bias conduction mechanisms on and off such hillocks: Poole-Frenkel and field emission, respectively. In the case of heteroepitaxial film growth on sapphire, C-AFM data do not indicate a strong correlation between topography and current conduction. I-V-T measurements of Schottky diodes show thermionic field emission at high forward bias and hopping conduction at reverse bias. KOH etching of the film improves its thermionic emission properties.
Keywords :
III-V semiconductors; Poole-Frenkel effect; Schottky diodes; atomic force microscopy; etching; gallium compounds; hopping conduction; molecular beam epitaxial growth; screw dislocations; semiconductor epitaxial layers; thermionic electron emission; C-AFM; GaN; KOH etching; MBE; Poole-Frenkel mechanism; Schottky diodes; conductive atomic force microscopy; current conduction; forward-bias conduction mechanisms; heteroepitaxial GaN films; hillocks; homoepitaxial GaN films; hopping conduction; reverse bias conduction; sapphire; screw dislocations; temperature dependent current-voltage measurements; thermionic field emission; topography; Atomic force microscopy; Atomic measurements; Conductive films; Conductivity measurement; Current measurement; Force measurement; Gallium nitride; Molecular beam epitaxial growth; Temperature dependence; Thermionic emission;
Conference_Titel :
Compound Semiconductors: Post-Conference Proceedings, 2003 International Symposium on
Print_ISBN :
0-7803-8614-0
DOI :
10.1109/ISCSPC.2003.1354424