Title :
Patterning high density SWNT networks on flexible Parylene-C substrate
Author :
Chen, C.-L. ; Yang, C.-F. ; Xiong, X. ; Busnaina, A. ; Dokmeci, M.R.
Author_Institution :
ECE Dept., NSF Center for High Rate Nanomanuf., Boston, MA, USA
Abstract :
In this work, a directed assembly technique for controlled micro-patterning of single-walled carbon nanotubes (SWNTs) on to a flexible parylene-C substrate has been demonstrated. A simple site-selective fluidic assembly of SWNTs has been utilized to directly assemble SWNTs on a plasma treated parylene-C substrate to form ordered high density carbon nanotube networks. Continuous nanotube micro-arrays and networks as small as 4 mum wide and lengths as long as 1500 mum have been fabricated. After fabrication, the parylene substrate containing the SWNT networks was peeled off from the polycarbonate substrate. We next performed both electrical and mechanical tests to further characterize the flexible SWNT networks. The measured resistance of patterned SWNT networks was around 300 Omega utilizing Au electrode pads. The test sample handled multiple bending cycles (tested up to 5 times) without showing any signs of hysteresis. High density patterning of carbon nanotube networks on flexible parylene-C substrates has potential applications including wearable electronics and sensors, flexible field effect transistors (FETs) and interconnects.
Keywords :
bending; carbon nanotubes; electric resistance; hysteresis; nanofabrication; nanopatterning; C; FET; continuous nanotube microarrays; controlled micropatterning; directed assembly technique; flexible field effect transistors; flexible parylene-C substrate; high density carbon nanotube networks; interconnects; multiple bending cycles; plasma treated parylene-C substrate; polycarbonate substrate; resistance; single-walled carbon nanotubes networks; site-selective fluidic assembly; wearable electronics; wearable sensors; Assembly; Carbon nanotubes; Electric resistance; Electrical resistance measurement; FETs; Fabrication; Gold; Performance evaluation; Plasma density; Testing; Dip Coating; Flexible Substrates; Fluidic Assembly; Single-Walled Carbon Nanotube Networks;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285846