Title :
Novel Displacement Measurement Technique of the Heterodyne Laser Interferometer for Nano Positioning
Keywords :
Demodulation; Displacement measurement; Instruments; Mechatronics; Optical interferometry; Phase measurement; Pulse width modulation; Signal resolution; Time measurement; Velocity measurement;
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
DOI :
10.1109/AIM.2005.1500969
