Title :
Characteristics of micromachined injection locking lasers
Author :
Cai, H. ; Liu, B. ; Tamil, J. ; Zhu, W.M. ; Tao, J.F. ; Zhang, W. ; Zhang, Q.X. ; Liu, A.Q.
Author_Institution :
Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore
Abstract :
This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Perot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability is found. Superior performances in terms of stability and narrow linewidth have been achieved.
Keywords :
Fabry-Perot interferometers; laser beam machining; laser mode locking; micromechanical devices; optical bistability; semiconductor lasers; sputter etching; Fabry-Perot multimode laser; MEMS; asymmetrical tuning curve; deep RIE processes; micromachined injection locking lasers; optical bistability; tunable laser; Fabry-Perot; Hysteresis; Injection-locked oscillators; Laser theory; Laser tuning; Master-slave; Micromechanical devices; Optical bistability; Optical tuning; Tunable circuits and devices; Deep RIE fabrication process; Photonic MEMS; injection locking laser; tunable lasers;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285852
