Title :
MEMS tunable Fabry-Perot Filters with thick, two sided optical coatings
Author :
Stupar, P.A. ; Borwick, R.L., III ; DeNatale, J.F. ; Kobrin, P.H. ; Gunning, W.J.
Author_Institution :
Teledyne Sci. & Imaging, Thousand Oaks, CA, USA
Abstract :
A MEMS based tunable Fabry-Perot filter array has been designed and fabricated to provide spectral information in the long-wave infrared (LWIR) band, while remaining transparent in the mid-wave infrared (MWIR) band. Due to the stringent requirements on the optical design, relatively thick optical reflector and anti-reflector coatings are needed. A two-sided, SOI device layer transfer process has been developed to fabricate the thick coating layers and maintain a balanced stress state on the thin moveable membrane of the filter. Fabricated parts have less than 11 nm of deflection across a 200 mum filter. Measured filters show a <120 nm bandwidth peak in the LWIR that is tunable from 11.8 mum to 7.9 mum.
Keywords :
antireflection coatings; infrared imaging; micro-optics; micromechanical devices; optical arrays; optical filters; silicon-on-insulator; MEMS tunable Fabry-Perot filter array; SOI device; antireflector coating; long wave infrared band; optical coatings; optical reflector; wavelength 11.8 mum to 7.9 mum; Biomembranes; Coatings; Fabry-Perot; Information filtering; Information filters; Infrared spectra; Micromechanical devices; Optical design; Optical filters; Stress; Fabry-Perot; MEMS; imaging; spectral imaging; tunable filter;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285853
