Title :
Thermo-optic infrared focal plane array
Author :
Yan, X. ; Feng, F. ; Wang, Y.L.
Abstract :
We reported an optically readable infrared focal plane array based on thermo-optic effect in this paper. The optical characteristics of the thermo-optic infrared focal plane array (TOFPA) are analyzed and simulated by ZEMAX software. The results show that the thermo-optic sensitivity and the average infrared absorption of the TOFPA can reach 6.23% K-1 and 65.2%, respectively. Then, the TOFPA is released by XeF2 etch using a sidewall passivation method. Finally, an optical system is designed for measuring the thermo-optical sensitivity of TOFPA.
Keywords :
focal planes; light absorption; optical computing; optical design techniques; thermo-optical effects; ZEMAX software; infrared absorption; infrared focal plane array; optical system; sidewall passivation method; thermo-optic effect; thermo-optic sensitivity; Assembly; Electromagnetic wave absorption; Infrared detectors; Infrared heating; Optical arrays; Optical films; Optical modulation; Optical refraction; Optical sensors; Optical variables control; Film; Infrared detectors; Infrared focal plane array; Thermo-optic;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285854
