Ion distribution functions in an ECR discharge plasma

Summary form only given. We have recently developed an axisymmetric quasineutral particle simulation code to study heating and transport of plasma in an ECR reactor configuration. All species are treated as particles with the electrons always strongly magnetized, and the degree of magnetization of the ions varying spatially. The code contains formulation for ECR heating. For this system with pressures on the order of a few milliTorr, the plasma can be high density and weakly collisional, with mean free paths on the order of a few centimeters. Particles may collide with the neutral gas in various states. The ion velocity distribution is primarily determined from the particle dynamics in the quasi-neutral fields, and sheaths, and by collisions with the neutral gas. The neutral collisions include momentum transfer and charge exchange. Ion collisions in the pre-sheath are particularly important, since they may determine the anisotropy of the ions after they traverse the sheath. We will present ion distribution functions at various locations in the plasma and near the sheaths.