DocumentCode
1863046
Title
Ellipsoidal micro lens fabricated by depositing parylene directly on liquid
Author
Miyamoto, R. ; Binh-Khiem, N. ; Iwase, E. ; Matsumoto, K. ; Shimoyama, I.
Author_Institution
Grad. Sch. of Inf. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
fYear
2009
fDate
21-25 June 2009
Firstpage
1365
Lastpage
1368
Abstract
We report on an ellipsoidal liquid lens fabricated by PoLD (Parylene on liquid deposition). We fabricated ellipsoidal liquid lenses of 0.50, 1.00, 1.50, and 2.00 mul in volume on hydrophilic elliptical domains with 5.00 mm major diameter and 2.50 mm minor diameter. We measured the two focal lengths corresponding to major and minor diameters by observing the image formed by a laser beam. We verified that measured focal lengths agreed with theoretical calculated results. In addition, we showed that our method enables us to fabricate ellipsoidal lenses which have the focal lengths as designed.
Keywords
microlenses; optical fabrication; optical polymers; ellipsoidal microlens; hydrophilic elliptical domains; parylene on liquid deposition; size 2.50 mm; size 5.00 mm; Lenses; Ellipsoidal lens; Liquid lens; Parylene; chemical vapor deposition;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285855
Filename
5285855
Link To Document