Title :
Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor
Author :
Goetz, M. ; Messner, S. ; Ashauer, M. ; Zengerle, R.
Author_Institution :
Inst. fur Mikro- und Informationstech. (HSG-IMIT), Hahn-Schickard-Gesellschaft, Villingen-Schwenningen, Germany
Abstract :
We present a system approach for precise liquid dosing at low costs. The highly integrated system operates at flow rates of 0-10 mL/min and with a back pressure of 0-75 kPa. It enables a flow with significantly reduced pulsation and a maximum deviation of 1.5%. The realization of the system is based on a smart combination of commercially available low cost fluidic components with a MEMS based thermal mass flow sensor of 1 ms response time.
Keywords :
flow sensors; microfluidics; micropumps; microsensors; MEMS flow sensor; back pressure; controlled liquid delivery; flow rates; fluidic components; integrated system; precise dosage system; pressure 0 kPa to 75 kPa; pump; thermal mass flow sensor; Control systems; Costs; Frequency; Micromechanical devices; Pressure control; Pumps; Sensor systems; Sensor systems and applications; Valves; Viscosity; dosing system; flow sensor; metering; pump; valve;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285859
