DocumentCode
1863284
Title
Adaptive Robust Precision Control of Piezoelectric Positioning Stages
Author
Jinghua Zhong ; Bin Yao
fYear
2005
fDate
2005
Firstpage
189
Lastpage
194
Keywords
Adaptive control; Atomic force microscopy; Bandwidth; Error correction; Frequency; Hysteresis; Piezoelectric actuators; Programmable control; Relays; Robust control;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN
0-7803-9047-4
Type
conf
DOI
10.1109/AIM.2005.1500988
Filename
1500988
Link To Document