DocumentCode
1863542
Title
Self-Built Multilayer Aligner for Imprint with Finite Element Method Simulation
Author
Cheng-Tang Pan ; Chi-Cheng Cheng ; Chin-Yin Chen
fYear
2005
fDate
2005
Firstpage
249
Lastpage
254
Keywords
Application software; Displays; Finite element methods; Lithography; Nonhomogeneous media; Organic materials; Resists; Sputter etching; Sputtering; Thin film transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN
0-7803-9047-4
Type
conf
DOI
10.1109/AIM.2005.1500998
Filename
1500998
Link To Document