DocumentCode
1863879
Title
Optimal Design and Control of a Voice Coil Motor Driven Flexure Hinge for AFM Actuator
Author
Woosub Youm ; Kyihwan Park
fYear
2005
fDate
2005
Firstpage
325
Lastpage
328
Keywords
Actuators; Atomic force microscopy; Atomic measurements; Bandwidth; Coils; Fasteners; Frequency response; Hysteresis motors; Micromotors; Optimal control;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN
0-7803-9047-4
Type
conf
DOI
10.1109/AIM.2005.1501011
Filename
1501011
Link To Document