Title :
Optimal Design and Control of a Voice Coil Motor Driven Flexure Hinge for AFM Actuator
Author :
Woosub Youm ; Kyihwan Park
Keywords :
Actuators; Atomic force microscopy; Atomic measurements; Bandwidth; Coils; Fasteners; Frequency response; Hysteresis motors; Micromotors; Optimal control;
Conference_Titel :
Advanced Intelligent Mechatronics. Proceedings, 2005 IEEE/ASME International Conference on
Print_ISBN :
0-7803-9047-4
DOI :
10.1109/AIM.2005.1501011
