DocumentCode
1864395
Title
Robustness of electrostatic MEMS actuators against electrical overstress
Author
De Coster, J. ; Rottenberg, X. ; Sangameswaran, S. ; Ekkels, P. ; Tilmans, H.A.C. ; De Wolf, I.
Author_Institution
IMEC, Leuven, Belgium
fYear
2009
fDate
21-25 June 2009
Firstpage
893
Lastpage
896
Abstract
The response of electrostatic actuators to electrical overstress is studied in this paper. More specifically, the use of passive components (resistors and capacitors) to diminish the harmful effects of electrical overstress is demonstrated. The influence of these passives on the normal operation of the devices is also studied.
Keywords
capacitors; electrostatic actuators; electrostatic discharge; resistors; capacitor; electrical overstress; electrostatic MEMS actuator; passive component; resistor; Earth Observing System; Electrostatic actuators; Electrostatic discharge; Impedance; Microelectromechanical devices; Micromechanical devices; Micromirrors; Resistors; Robustness; Testing; EOS/ESD; MEMS; electrostatic actuator;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location
Denver, CO
Print_ISBN
978-1-4244-4190-7
Electronic_ISBN
978-1-4244-4193-8
Type
conf
DOI
10.1109/SENSOR.2009.5285905
Filename
5285905
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