Title :
Micro- and nanostructured magnetic field sensor for space applications
Author :
Persson, A. ; Nguyen, H. ; Riddar, F. ; Thornell, G.
Author_Institution :
Dept. of Eng. Sci., Uppsala Univ., Uppsala, Sweden
Abstract :
Magnetometers are popular payloads on scientific space missions. Here, the design and fabrication process of a miniaturized magnetometer based on tunneling magnetoresistance is presented. The process is capable of making magnetic tunnel junctions in a wide size range, by employing both UV lithography and focused ion beam milling and deposition. Ga implantation in the ferromagnetic electrodes of the junction is studied in more detail. It was shown that Ga implantation may harm the magnetometer if the irradiation dose exceeds 1014 Ga+ cm-2.
Keywords :
aerospace instrumentation; ferromagnetic materials; focused ion beam technology; gallium; ion implantation; magnetic field measurement; magnetic sensors; magnetometers; microelectrodes; microsensors; milling; sputtered coatings; tunnelling magnetoresistance; ultraviolet lithography; Ga; UV lithography; ferromagnetic electrode implantation; focused ion beam deposition; focused ion beam milling; magnetic tunnel junction; microstructured magnetic field sensor; miniaturized magnetometer; nanostructured magnetic field sensor; scientific space missions; space applications; tunneling magnetoresistance; Fabrication; Ion beams; Lithography; Magnetic sensors; Magnetic tunneling; Magnetometers; Payloads; Process design; Space missions; Tunneling magnetoresistance; Ga implantation; Magnetometer; focused ion beam; magnetic tunnel junction; tunneling magnetoresistance;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285916
