Title :
Parametrically amplified MEMS magnetometer
Author :
Thompson, Matthew J. ; Horsley, David A.
Author_Institution :
Mech. & Aeronaut. Eng. Dept., Univ. of California, Davis, CA, USA
Abstract :
This paper demonstrates how parametric amplification can improve the system wide signal to noise ratio (SNR) of MEMS resonant force sensors. Experiments demonstrate how parametric amplification increases the mechanical sensitivity of a Lorentz force based MEMS magnetometer. This increase in mechanical sensitivity amplifies both the Lorentz and Brownian forces. The RMS displacement caused by the 39 nT/radiclHz Brownian noise floor is amplified from 13.75 pm to 283 pm. In this study a maximum stable magnetic field sensitivity increase of 51 times was achieved which has an equivalent amplification to a linear resonator with a quality factor (Q) of 40,000.
Keywords :
force sensors; magnetometers; micromechanical devices; Brownian force; Lorentz force; MEMS resonant force sensors; mechanical sensitivity; parametrically amplified MEMS magnetometer; quality factor; signal to noise ratio; Equations; Force sensors; Frequency; Lorentz covariance; Magnetic materials; Magnetometers; Micromechanical devices; Q factor; Signal to noise ratio; Springs; Lorentz Force; Magnetometer; Parametric; Parametric amplification;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285917
