Title :
Pressure stable thermoelectric flow sensors by means of membrane perforation
Author :
Kropp, M. ; Kutzner, C. ; Hartgenbusch, N. ; Gu, S. ; Sosna, C. ; Buchner, R. ; Hauptmann, P. ; Lang, W.
Author_Institution :
IMSAS, Univ. of Bremen, Bremen, Germany
Abstract :
A commonly used method for measurements of small liquid flows are membrane based thermoelectric flow sensors. High temperature stable flow sensors have been developed and fabricated at IMSAS. A pressure stable version of these sensors has been developed by creating a membrane with perforation. Thereby a backpressure compensation is achieved. Here we present the fabrication process, first measurements and simulation results showing pressure stability to at least 8 bar.
Keywords :
flow measurement; flow sensors; membranes; microsensors; thermoelectric devices; backpressure compensation; membrane; perforation; pressure stability; small liquid flow measurement; thermoelectric flow sensors; Biomembranes; Chemical sensors; Fluid flow measurement; Pressure measurement; Sensor systems; Silicon compounds; Temperature sensors; Thermal sensors; Thermoelectricity; Wafer bonding; flow sensor; membrane perforation; pressure stable;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285929
