Title :
Fiber-optical acoustic sensor based on a photonic-crystal diaphragm
Author :
Kilic, O. ; Digonnet, M.J.F. ; Kino, G.S. ; Solgaard, O.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., Stanford, CA, USA
Abstract :
This paper reports on a highly sensitive fiber-optical acoustic sensor. The miniature acoustic sensor consists of a Fabry-Perot interferometer made of a photonic-crystal reflector embedded on a compliant silicon diaphragm placed at the tip of a single-mode fiber. A high-reflectivity multilayer dielectric mirror is deposited on the tip of the single-mode fiber. When combined with the high reflection from the photonic-crystal mirror, this second mirror forms a Fabry-Perot with a relatively high finesse (~15), giving rise to a high pressure sensitivity over the 10-50 kHz range. A minimum detectable pressure of 30 muPa/Hz12 at 15 kHz is reported.
Keywords :
Fabry-Perot interferometers; diaphragms; elemental semiconductors; fibre optic sensors; mirrors; optical multilayers; photoacoustic effect; photonic crystals; pressure measurement; pressure sensors; reflectivity; silicon; Fabry-Perot interferometer; Si; high-reflectivity multilayer dielectric mirror; high-sensitive fiber-optical acoustic sensor; photonic-crystal diaphragm; photonic-crystal reflector; pressure detection; pressure sensitivity; silicon diaphragm; single-mode fiber; Acoustic reflection; Acoustic sensors; Etching; Fabry-Perot; Gas detectors; Mirrors; Optical fiber sensors; Optical reflection; Optoelectronic and photonic sensors; Silicon; Fabry-Perot; Fiber-optic sensor; acoustic sensor; photonic-crystal mirror;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285932
