Title :
High sensitivity ultrasonic transducer array for 2-D hydropohone application, using an epitaxial PZT thin film grown on γ-Al2O3/Si
Author :
Kanja, Ikuo ; Otonari, Mikito ; Yogi, Takahiro ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto ; Okada, Nagaya ; Higuchi, Kazuki
Author_Institution :
Dept. of EEE, Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
A ultrasonic transducer array was fabricated using an epitaxial Pb(Zr,Ti)O3 (PZT) thin film grown on SrRuO3/Pt/gamma-Al2O3/Si structures. The fabricated diaphragm transducer 2-D array with 8 times 8 elements has developed by XeF2 gas from the topside of Si.
Keywords :
thin films; ultrasonic transducer arrays; 2D hydropohone application; Al2O3-Si; SrRuO3/Pt/gamma-Al2O3/Si structure; diaphragm transducer 2D array; epitaxial PZT thin film; epitaxial Pb(Zr,Ti)O3 thin film; high sensitivity ultrasonic transducer array; Aluminum oxide; Circuits; Fabrication; Piezoelectric films; Semiconductor thin films; Substrates; Transistors; Ultrasonic transducer arrays; Ultrasonic transducers; Ultrasonic variables measurement; γ-Al2O3; 2-D array; PZT; Si integrated; Ultrasonic transducer; epitaxial;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285934
