Title :
Fabrication of dense flow sensor arrays on flexible membranes
Author :
Izadi, N. ; de Boer, M.J. ; Berenschot, J.W. ; Wiegerink, R.J. ; Lammerink, T.S.J. ; Jansen, H.V. ; Mogdans, J. ; Krijnen, G.J.M.
Author_Institution :
Transducers Sci. & Technol. Group, Univ. of Twente, Enschede, Netherlands
Abstract :
Biological sensory systems often display great performance which inspires engineers to design artificial counterparts. In this paper we report the fabrication of aquatic hair based flow sensors inspired by fish lateral line. Geometrically optimized flexible membranes of SU-8 with integrated electrodes underneath have been realized in a reliable, high yield process. By separating the liquid medium from readout electrodes we decrease squeeze film damping and eliminate electrolysis. The procedure allows dense membrane array fabrication.
Keywords :
bio-inspired materials; flow sensors; membranes; microfabrication; microsensors; sensor arrays; SU-8; aquatic hair; biological sensory systems; dense flow sensor arrays; electrolysis; fish lateral line; flexible membranes; readout electrodes; squeeze film damping; Biomembranes; Biosensors; Design engineering; Displays; Electrodes; Fabrication; Hair; Marine animals; Reliability engineering; Sensor arrays; Biomimetic; DRIE; Flow sensors; Lateral line; SU-8;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285945
