Title :
MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environment
Author :
Ducloux, O. ; Park, J.-W. ; Tiercelin, N. ; Pernod, P. ; Preobrazhensky, V. ; Hamon, M. ; Sakai, Y. ; Fujita, H.
Author_Institution :
LIMMS/CNRS-IIS (UMI 2820), Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper presents a novel type of remotely actuated, chemical or bio-sensor based on a MEMS resonator actuated by a multilayered (TbCo/FeCo) x25 nanostructured magnetostrictive film in liquid environment. The active film is polarized in order to induce spin reorientation transition, yielding giant sensitivity to a dynamical actuation magnetic field. Moreover, the resonator is placed at the air/liquid interface in order to increase its quality factor. Sensing results in different viscosity solutions are presented. The possibility to use such a device for the fast determination of cellular density is also demonstrated.
Keywords :
Q-factor; biosensors; chemical sensors; iron compounds; micromechanical resonators; nanostructured materials; terbium compounds; thin films; MEMS resonators; TbCo-FeCo; air-liquid interface; biosensor; cellular density; chemical sensor; dynamical actuation magnetic field; liquid environment; nanostructed magnetostrictive film multilayers; quality factor; spin reorientation transition; Biosensors; Etching; Magnetic films; Magnetic materials; Magnetic multilayers; Magnetic resonance; Magnetostriction; Micromechanical devices; Optical resonators; Silicon; Biosensor; cantilever; liquid environment; magnetostriction; resonator; spin reorientation transition;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285961
