Title :
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407)
Abstract :
Presents the front cover and table of contents from the conference proceedings.
Keywords :
DRAM chips; EPROM; MIM devices; MOSFET; SRAM chips; VLSI; atomic layer deposition; dielectric materials; electron mobility; elemental semiconductors; ferroelectric devices; integrated circuit interconnections; lithography; silicon; CMOS integrated circuits; DRAM; EPROM; FRAM; MIM capacitor; MISFET; SRAM; Si; VLSI; advanced memory; analog devices; high performance devices; high-K dielectrics; lithography; multilevel interconnects; nonvolatile memory; process technology; strained silicon MOSFET;
Conference_Titel :
VLSI Technology, 2003. Digest of Technical Papers. 2003 Symposium on
Conference_Location :
Kyoto, Japan
Print_ISBN :
4-89114-033-X
DOI :
10.1109/VLSIT.2003.1221057
