DocumentCode
1866023
Title
2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407)
fYear
2003
fDate
10-12 June 2003
Abstract
Presents the front cover and table of contents from the conference proceedings.
Keywords
DRAM chips; EPROM; MIM devices; MOSFET; SRAM chips; VLSI; atomic layer deposition; dielectric materials; electron mobility; elemental semiconductors; ferroelectric devices; integrated circuit interconnections; lithography; silicon; CMOS integrated circuits; DRAM; EPROM; FRAM; MIM capacitor; MISFET; SRAM; Si; VLSI; advanced memory; analog devices; high performance devices; high-K dielectrics; lithography; multilevel interconnects; nonvolatile memory; process technology; strained silicon MOSFET;
fLanguage
English
Publisher
ieee
Conference_Titel
VLSI Technology, 2003. Digest of Technical Papers. 2003 Symposium on
Conference_Location
Kyoto, Japan
Print_ISBN
4-89114-033-X
Type
conf
DOI
10.1109/VLSIT.2003.1221057
Filename
1221057
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