Title :
Self-assembled micro-scanner fabricated by surface-micromachining technology
Author :
Su, G.D. ; Wu, M.C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
Summary form only given. Optical scanners are used in a wide variety of applications. Scanning micromirrors fabricated using the micromachining technology is very attractive because of smaller size, lighter mass, and lower power consumption. In this paper, we report on the performance of an out-of-plane tilt torsion mirror that can be self-assembled by the integrated scratch drive actuator (SDA). This device is compact, lightweight, and can be mass-produced at potentially very low cost.
Keywords :
micro-optics; micromachining; mirrors; optical fabrication; optical scanners; self-assembly; integrated scratch drive actuator; lighter mass; lower power consumption; mass-produced; micromachining technology; optical scanners; out-of-plane tilt torsion mirror; scanning micromirror fabrication; self-assembled; self-assembled micro-scanner fabrication; smaller size; surface-micromachining technology; very low cost; Actuators; Biomedical optical imaging; Bit error rate; Frequency synchronization; Mirrors; Optical microscopy; Optical surface waves; Robust stability; Voltage; Wavelength measurement;
Conference_Titel :
Lasers and Electro-Optics, 1999. CLEO '99. Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
1-55752-595-1
DOI :
10.1109/CLEO.1999.834075
