Microcantilever sensor using photonic crystal nanocavity resonator

Author

Xiang, Wenfeng ; Hsiao, Fu-Li ; Lee, Chengkuo

Author_Institution

Departmen of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2009

fDate

21-25 June 2009

Firstpage

959

Lastpage

962

Abstract

A novel nanomechanical cantilever sensor integrated with photonic crystal (PC) resonator is investigated computationally in this study. A U-shaped PC waveguide with a nanocavity resonator located at the edge of a suspended cantilever can be applied to detect cantilever bending in solution. The detection limit of this nanomechanical cantilever sensor operated in water is better than that of the same one operated in air. It implies promising features that this novel nanomechanical cantilever sensor could be good at biomolecules detection.

Keywords

cantilevers; cavity resonators; microsensors; photonic crystals; cantilever bending; microcantilever sensor; photonic crystal nanocavity resonator; Biomedical optical imaging; Biosensors; Nanobioscience; Optical refraction; Optical resonators; Optical sensors; Optical variables control; Optical waveguides; Optoelectronic and photonic sensors; Photonic crystals; NEMS; Nanomechanical Sensors; Photonic Crystal;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285976

Filename

5285976