Title :
Microcantilever sensor using photonic crystal nanocavity resonator
Author :
Xiang, Wenfeng ; Hsiao, Fu-Li ; Lee, Chengkuo
Author_Institution :
Departmen of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A novel nanomechanical cantilever sensor integrated with photonic crystal (PC) resonator is investigated computationally in this study. A U-shaped PC waveguide with a nanocavity resonator located at the edge of a suspended cantilever can be applied to detect cantilever bending in solution. The detection limit of this nanomechanical cantilever sensor operated in water is better than that of the same one operated in air. It implies promising features that this novel nanomechanical cantilever sensor could be good at biomolecules detection.
Keywords :
cantilevers; cavity resonators; microsensors; photonic crystals; cantilever bending; microcantilever sensor; photonic crystal nanocavity resonator; Biomedical optical imaging; Biosensors; Nanobioscience; Optical refraction; Optical resonators; Optical sensors; Optical variables control; Optical waveguides; Optoelectronic and photonic sensors; Photonic crystals; NEMS; Nanomechanical Sensors; Photonic Crystal;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International
Conference_Location :
Denver, CO
Print_ISBN :
978-1-4244-4190-7
Electronic_ISBN :
978-1-4244-4193-8
DOI :
10.1109/SENSOR.2009.5285976
