A micro gas preconcentrator with improved performances for environmental monitoring

Author

Camara, E.H.M. ; Breuil, P. ; Briand, D. ; Guillot, L. ; Pijolat, C. ; de Rooij, N.F.

Author_Institution

Centre SPIN, Ecole Nat. Super. des Mines, St. Etienne, France

fYear

2009

fDate

21-25 June 2009

Firstpage

983

Lastpage

986

Abstract

This paper presents the optimization of a micro gas preconcentrator applied to environmental monitoring. Different types of adsorbent materials introduced in silicon microchannels with various designs have been investigated and a special focus has been dedicated to the modes of operation of the preconcentrator. The optimization of the device and its operation were driven by its future application in outdoor environments. Parameters such as the preconcentration factor, cycle time and the influence of the humidity were considered along the optimization process. As a result of this study, a preconcentrator with a total cycle time of 10 minutes and the use of single wall carbon nanotubes (SWCNTs) as adsorbent exhibits a good preconcentration factor for VOCs with a limited influence of the humidity.

Keywords

carbon nanotubes; gas sensors; humidity; microchannel flow; pollution measurement; silicon; C; SWCNT; VOC; adsorbent materials; cycle time; environmental monitoring; humidity; microgas preconcentrator; preconcentration factor; silicon microchannels; single wall carbon nanotubes; time 10 min; Carbon dioxide; Carbon nanotubes; Etching; Fluid flow; Humidity; Microchannel; Monitoring; Nanoparticles; Silicon; Wafer bonding; Carbon nanotubes; Gas sensors; Micro-channel; Porous silicon; Pre-concentrator;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International

Conference_Location

Denver, CO

Print_ISBN

978-1-4244-4190-7

Electronic_ISBN

978-1-4244-4193-8

Type

conf

DOI

10.1109/SENSOR.2009.5285982

Filename

5285982