• DocumentCode
    1866913
  • Title

    Synthesis of crystalline nanorods as water soluble sacrificial structures

  • Author

    Amouzgar, M. ; Yaghootkar, B. ; Mashayekh, N. ; Kahrizi, M.

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, QC, Canada
  • fYear
    2012
  • fDate
    April 29 2012-May 2 2012
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Sodium carbonate nanorods were fabricated using a wet etching technique, as water soluble sacrificial structure, for nano and micro-machining applications. Energy Dispersive X-Ray (EDX) and Raman analyses were performed to characterize the nanorods. A Raman shift of 940 cm-1 was obtained for sodium carbonate structure which differs from the bulk due to its nano-scale size. The free-standing water soluble nanorods can be used as sacrificial layer to fabricate porous membranes, with pre-determined pore locations, for the growth of other types of nanorods.
  • Keywords
    Raman spectra; X-ray chemical analysis; etching; membranes; nanofabrication; nanoporous materials; nanorods; sodium compounds; solubility; wetting; EDX; Na2CO3; Raman shift; energy dispersive X-ray analysis; free-standing water soluble nanorods; micromachining applications; nanomachining applications; nanoscale size; pore location determination; porous membrane fabrication; sacrificial layer; sodium carbonate crystalline nanorod synthesis; sodium carbonate structure; water soluble sacrificial structure; wet etching technique; Chemical elements; Etching; Fabrication; Plastics; Silicon; Nanorod Fabrication Template; Nanorods; Sacrificial Nanostructures; Silicon Texturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electrical & Computer Engineering (CCECE), 2012 25th IEEE Canadian Conference on
  • Conference_Location
    Montreal, QC
  • ISSN
    0840-7789
  • Print_ISBN
    978-1-4673-1431-2
  • Electronic_ISBN
    0840-7789
  • Type

    conf

  • DOI
    10.1109/CCECE.2012.6334882
  • Filename
    6334882