DocumentCode
1866913
Title
Synthesis of crystalline nanorods as water soluble sacrificial structures
Author
Amouzgar, M. ; Yaghootkar, B. ; Mashayekh, N. ; Kahrizi, M.
Author_Institution
Dept. of Electr. & Comput. Eng., Concordia Univ., Montreal, QC, Canada
fYear
2012
fDate
April 29 2012-May 2 2012
Firstpage
1
Lastpage
4
Abstract
Sodium carbonate nanorods were fabricated using a wet etching technique, as water soluble sacrificial structure, for nano and micro-machining applications. Energy Dispersive X-Ray (EDX) and Raman analyses were performed to characterize the nanorods. A Raman shift of 940 cm-1 was obtained for sodium carbonate structure which differs from the bulk due to its nano-scale size. The free-standing water soluble nanorods can be used as sacrificial layer to fabricate porous membranes, with pre-determined pore locations, for the growth of other types of nanorods.
Keywords
Raman spectra; X-ray chemical analysis; etching; membranes; nanofabrication; nanoporous materials; nanorods; sodium compounds; solubility; wetting; EDX; Na2CO3; Raman shift; energy dispersive X-ray analysis; free-standing water soluble nanorods; micromachining applications; nanomachining applications; nanoscale size; pore location determination; porous membrane fabrication; sacrificial layer; sodium carbonate crystalline nanorod synthesis; sodium carbonate structure; water soluble sacrificial structure; wet etching technique; Chemical elements; Etching; Fabrication; Plastics; Silicon; Nanorod Fabrication Template; Nanorods; Sacrificial Nanostructures; Silicon Texturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical & Computer Engineering (CCECE), 2012 25th IEEE Canadian Conference on
Conference_Location
Montreal, QC
ISSN
0840-7789
Print_ISBN
978-1-4673-1431-2
Electronic_ISBN
0840-7789
Type
conf
DOI
10.1109/CCECE.2012.6334882
Filename
6334882
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