DocumentCode
186746
Title
Fundamentals and future applications of Laser Voltage Probing
Author
Kindereit, Ulrike
Author_Institution
Qualcomm Technol., Inc., San Diego, CA, USA
fYear
2014
fDate
1-5 June 2014
Abstract
This paper will give an overview of the history of Laser Voltage Probing, explain the physical background of the signal generation process, provide insight into various detection schemes and measurement methods that were and currently are used in the industry and discuss challenges for future technology nodes and highlight development areas.
Keywords
failure analysis; integrated circuit measurement; integrated circuit reliability; integrated circuit testing; measurement by laser beam; signal detection; detection schemes; failure analysis; laser voltage probing; measurement methods; signal generation process; technology nodes; Indexes; Interference; Laser beams; Measurement by laser beam; Optical refraction; Semiconductor device measurement; Silicon; CW; FinFET; Franz-Keldysh effect; LTP; LVP; MLL; VLI; amplitude; electro-absorption; free carrier effects; frequency mapping; lock-in aplifier; modulation mapping; phase detection; signal generation; spectrum analyzer; thermal; wavelength;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2014 IEEE International
Conference_Location
Waikoloa, HI
Type
conf
DOI
10.1109/IRPS.2014.6860635
Filename
6860635
Link To Document